| 摘要 |
PROBLEM TO BE SOLVED: To provide an alternative system and method for providing highly integrated optical readout MEMS sensors.SOLUTION: A system and method for highly integrated optical readout MEMS sensors are provided. In one embodiment, an integrated waveguide optical pickoff sensor comprises the steps of: launching a laser beam generated by a laser light source to an integrated waveguide optical pickoff monolithically fabricated within a first substrate, in which the integrated waveguide optical pickoff includes an optical input port, a coupling port and an optical output port; and detecting an amount of coupling of a laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring attenuation of the laser beam at the optical output port.SELECTED DRAWING: Figure 1 |
