| 摘要 |
PURPOSE:To facilitate the design and manufacture of a vibration sensor having resonance at a specified frequency, by separating starting and finishing parts of laser machining from the vibrating part of a bent vibrator. CONSTITUTION:When a bent vibrating mode vibrator is machined in a stuck piezoelectric vibrator, the machining is started from the part just beside a vibrating part. After slits 3 are cut out, the machining is stopped at the part just beside the vibrating part. Since the part surrounded by the slits 3 becomes the vibrating part, a resonant frequency Fr is determined by a length (l) of the vibrating part and a thickness of the vibrating part. The length of the vibrating part can be made constant regardless of the size of the hole at the parts where the machining is started and finished. The resonant frequency can be matched with a specified frequency readily. Only the parts for the vibration part and for taking out the output are made to be electrodes 1a and 2a. Thus the deterioration in insulation resistance between the electrodes caused by the fused material, which is attached to the cut surface of the starting and finishing parts of the machining, can be prevented. |
