发明名称 WIRE BONDER
摘要 PURPOSE:To make sure set work for conditions and the situation of the formation of a ball easily and rapidly by forming a cover by a transparent material. CONSTITUTION:One end of a bonding arm 12 is supported pivotally to a bonding head 11 loaded on an X-Y table 10 in a vertically vibratory manner, and a capillary 13 is fixed at the nose of the arm 12. A wire wound on a spool, an Al wire 14, is inserted into the capillary 13, and the tip of the Al wire is projected to the lower section of the capillary. An approximately L-shaped hollow electrode 19, an upper end thereof is supported 18 axially by a supporter 17, is disposed at a position near to the capillary 13, and a discharge section 20 on the lower side of the electrode 19 can be vibrated in the direction rectangular to a paper surface. A shielding cylinder 22 consists of a cylindrical collar 24 made of a transparent material, such as a transparent resin, heat-resistant glass, etc. and disks 25, 26, which are each fixed at both ends of the collar 24 and seal both ends of the collar 24, and one disk 25 is supported to the discharge section 20 of the electrode 19 under the state of penetration.
申请公布号 JPS59139637(A) 申请公布日期 1984.08.10
申请号 JP19830012728 申请日期 1983.01.31
申请人 HITACHI SEISAKUSHO KK 发明人 OKAMOTO MICHIO
分类号 H01L21/60 主分类号 H01L21/60
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