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发明名称
VERFAHREN ZUR KONTROLLE DER MIKRORAUHIGKEIT VON HALBLEITERSCHEIBEN
摘要
申请公布号
DD161054(A2)
申请公布日期
1984.09.05
申请号
DD19800225711
申请日期
1980.12.04
申请人
VEB WERK F. FERNSEHELEKTRONIK BERLIN,1160 BERLIN, OSTENDSTR. 1-5,DD
发明人
DEHMLOW,RONALD,DD;KRAUSE,RAINER,DD
分类号
H01L21/30;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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