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发明名称
METHOD OF PRODUCING A CONDUCTOR IN A DESIRED PATTERN ON A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
EP0068843(A3)
申请公布日期
1984.09.12
申请号
EP19820303326
申请日期
1982.06.25
申请人
FUJITSU LIMITED
发明人
SATO, NORIAKI
分类号
C23C14/06;C23C14/16;C23C14/58;H01L21/28;H01L21/768;H01L21/8242;H01L29/78;(IPC1-7):H01L21/28;H01L21/90
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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