| 摘要 |
PURPOSE:To enable to improve the characteristic of spectral sensitivity and to take a countermeasure against smear phenomenon by eliminating the gap between a one-layer wiring and a light shielding film, and using chromium of a small reflectance for the light shielding film. CONSTITUTION:An insulation film 10 composed of Cr oxide is provided on the surface of the one-layer wiring 6, and the light shielding film 11 composed of Cr of a small reflectance is provided thereon except for the light receiving part. Besides, an insulation film 12 of SiO2, etc. to protect a smooth coating film 7 from moisture is arranged between these light shielding films 11, i.e., at the light receiving part. Here, the insulation film 10 composed of Cr oxide exists between the one-layer wiring 6 and the light shielding film 11 wherein gaps are removed, being provided to insulate both, and the film thickness is sufficient in apporx. 0.1mum to the utmost. Therefore, in this case, the inconvenience that the light of a specific wave length passing through a color filter wanders in the insulation film, going astray into another photo diode by the irregular reflection on the light shielding film of a high reflectance, and thus penetrating into the source and the drain, as in the conventional construction is solved. |
