| 摘要 |
PURPOSE:To improve the uniformity of a thin film formed on a substrate by piercing rectangular vapor holes in the inner and top lids of a boat for vacuum deposition having a three-layered structure. CONSTITUTION:Rectangular vapor holes 2b, 3b are pierced in the inner and top lids 2, 3 of a boat for vacuum deposition having a three-layered structure. The radiating state of vapor emitted from the boat through the holes 2b, 3b is changed, and the degree of contact with a substrate on a turntable is increased, so the uniformity of a thin film formed on the substrate is improved. A change in the characteristics of the film is reduced, and accuracy in vacuum deposition is improved. The boat shows its effect in the formation of a film for an image pickup tube by deposition in high vacuum. |
