发明名称 |
DUAL-DETECTION RESIDUAL GAS ANALYZER |
摘要 |
A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector. |
申请公布号 |
EP2946203(A4) |
申请公布日期 |
2016.10.05 |
申请号 |
EP20130865866 |
申请日期 |
2013.12.19 |
申请人 |
INFICON, INC. |
发明人 |
WRIGHT, KENNETH, CHARLES;DESANTIS, JOHN, JAMES |
分类号 |
G01N27/62;C23C14/00;C23C16/44;H01J49/02;H01J49/06 |
主分类号 |
G01N27/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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