发明名称 PROCESSING DEVICE
摘要 PURPOSE:To perform the dripping of cleanser stagnant at the rear ends of specimens effectively by a method wherein a conveyer belt in a drying compartment is inclined upward in the advancing direction and drying air is jetted over the specimens advancing along the unclined surface. CONSTITUTION:Nozzles 6 jetting processing aolution downward are fixed inside a processing compartment 1 and specimens 4 with their processed surfaces turned upward are horizontally forwarded by a conveyer belt 5 at constant speed to a cleaning compartment 2 after being processed. The other nozzles 7 jetting pure water over both sides of the speciments 4 are fixed above and below the belt 5 holding the belt 5 inside the cleaning compartment 2 to clean up the processing solution sticked on both sides of the specimens 4 by the jet of the pure water. Then the specimens 4 are forwarded to a drying comparment 3 to be conveyed on the inclined belt 11 and the pure water 10 stagnant on the specimens 4 flows along the inclination to be collected at the rear ends of the specimens 4. The pure water 10 may be blown away by drying air from the other nozzles 8 to dry up the specimens 4.
申请公布号 JPS59204238(A) 申请公布日期 1984.11.19
申请号 JP19830078778 申请日期 1983.05.04
申请人 NIPPON DENKI KK 发明人 HIRAGA TAIJI
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址