发明名称 MATERIAL HOLDING DEVICE
摘要 PURPOSE:To secure such a device as making both efficiencies of operatability and heat transmission compatible so well, by constituting the device so as to place a processed material directly on a holder, while attaching a seal pin to a moving plate in a vertical direction. CONSTITUTION:On the top of a holder 11, there are provided with a lot of small holes 14 reaching to the extent of a cavity part 12, while a sheetlike soft material 15 having elasticity of silicone rubber or the like is placed on the top of the holder. Also in this soft material, there are provided with a lot of small holes 16 being interconnected to the said small holes of the holder. A processed material 17 is placed on this soft material. On a moving plate 3, many spherical seal members 18 are held at a position corresponding to these small holes, and with the moving plate 13 moved upward, these seal members are so constituted as to block up each end of these small holes in design. Each spherical seal 18 is locked by a seal pin 19 being slidably piercing the moving plate 13, while this seal pin 19 is being pushed upward by dint of a spring 20.
申请公布号 JPS6020438(A) 申请公布日期 1985.02.01
申请号 JP19830129040 申请日期 1983.07.15
申请人 NIPPON DENSHI KK 发明人 WATANABE IWAO
分类号 H01J37/20;H01J37/30;H01J37/34 主分类号 H01J37/20
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