MULTIPLE RANGE CAPACITIVE PRESSURE TRANSDUCER

摘要

There is provided a multirange, variable capacitance pressure transducer by bonding a diaphragm plate that is conductive between a pair of insulating plates with the diaphragm plate having a plurality of cavities provided on each side so that diaphragm deflection areas of different sizes are defined. The surfaces of the pair of plates in the cavities are covered by a conductive coating so that the coatings form capacitors with the deflection areas. A fluid communication path is provided to each cavity so that the pressure difference to be measured is placed across the deflection area. Electrical connection is made to selective combinations of said capacitors to provide pressure transducers for a number of ranges in one unit.