发明名称 回転機構、回転駆動装置、搬送装置及び製造装置
摘要 PROBLEM TO BE SOLVED: To provide a rotation mechanism having a long-life shaft and improving workability of component replacement, a rotation drive device, a transportation device and a manufacturing device.SOLUTION: A rotation mechanism partitions two spaces having different voltage, and includes: a housing 2; a shaft 31 that is inserted into the housing 2; a bearing 4 that is included in the housing 2 and rotatably supports the shaft 31; a rotation part 32 that is fixed to one end part of the shaft 31 and rotates along with the shaft 31 and in which a radial outside surface is opposite to the housing with a predetermined gap; annular seal members 5A, 5B that contact with the radial outside surface of the rotation part 32 and seals the gap.
申请公布号 JP6020435(B2) 申请公布日期 2016.11.02
申请号 JP20130255488 申请日期 2013.12.10
申请人 日本精工株式会社 发明人 金 秀樹
分类号 F16J15/3204;F16C19/04;F16C33/78;F16C35/063;F16C35/07;H01L21/68 主分类号 F16J15/3204
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