| 摘要 |
PURPOSE:To remove a disk rapidly and surely without damage by pressing down the outer periphery of a transparent substrate against a stamper and by lifting at the same time the inner periphery with the supporting member. CONSTITUTION:Removing is performed by placing vacuum pads 38 downward and pressing the outer periphery of a substrate 43 with a ring-shaped seal 47. Then, a cam 31 is rotated, and the innermost periphery of photopolymer which is hardened integrally with the substrate 43 is lifted with a center boss 25, for instance, as much as 1-3mm. so as to be removed from a stamper 15. By the above process the innermost periphery of a resin layer is removed. Under the above condition, compressed air is supplied to the innermost periphery of the resin layer through the communication passage 34b and, then, by reducing the pressure of the vacuum pads 38, the ring-shaped seal 47 is sucked and lifted. Further, by sucking up the substrate 43 with the vacuum pads 37, the outermost periphery of the resin layer is removed. |
