OPTICAL INFORMATION RECORDING MEDIUM AND ITS PRODUCTION

摘要

PURPOSE:To obtain a recording film which is free from oxidation despite a long- period storage having a long lifetime by mixing both carbon and hydrogen into a photomagnetic recording film. CONSTITUTION:A substrate 11 is put on a counter electrode 16 serving as a substrate holder and a vacuum container 11 is exhausted. Then mixed gas of gaseous Ar and gaseous hydrocarbon is introduced to the container 11 through a gas feed hole 13, and the high frequency electric power is applied through an electric power introduction terminal 15 to start discharge. A rare earth transition metall alloy target is sputtered with the mixed plasma of gaseous AR and gaseous hydrocarbon to form a recording film 4 consisting of a rare earth-transition metal, carbon and hydrogen on the substrate 1.