| 摘要 |
PURPOSE:To increase plasma generation efficiency by arranging a gas excitation device using high-energy beam right before a gas inlet so as to introduce the excited gas into a chamber. CONSTITUTION:A gas, e.g., oxygen gas is introduced into a high-energy beam irradiation chamber 8 through a gas inlet 11. Then the oxigen gas is excited by a high-energy beam e.g., ultraviolet rays projected from a high-energy beam emission source 9 and it becomes an ozone state. And, it is introduced into a plasma chamber through a gas inlet 2 and becomes a plasma state by high frequency between an upper electrode 4 and a lower electrode 5. As the oxygen gas has been in an ozone state at that time, it becomes the plasma state very efficiently. |
