| 摘要 |
PURPOSE:To improve the efficiency of analysis by providing a means for storing information signals and scanning position signals obtained from the sample and performing scanning in a spiral form from the most important point on the sample surface. CONSTITUTION:An X-ray beam 6 discharged from an excitation source 8 is irradiated upon a sample 1, and then characteristic X-rays 7 discharged from the sample 1 are detected by a detector 9 such as a proportional counter before the result of the detection is supplied to a memory 5. A sample base 2 on which the sample 1 is placed is moved in the X and the Y directions by means of drivers 3 and 4 to move the point, upon which the X-ray beam 6 becomes incident, in a spiral form and the signal indicating the position of the above point is supplied to a memory 5. The signal from the detector 9 is stored in the unit memory element of the memory 5 for storing the position determined by the positional signal (x, y). And, the content of the memory 5 is scanned and displayed by a television 10. Therfore, it is possible to preferentially analyze an arbitrary point on the sample surface and subsequently analyze peripheral points successively. Consequently, operation efficiency can be improved by eliminating useless analysis. |
