| 摘要 |
PURPOSE:To form a compact and high-purity oxidized film by performing the cleaning of the body to be worked with electric discharge in the gaseous atmosphere for cleaning and thereafter introducing oxygen or gaseous mixture contg. oxygen to form an oxidized film on the surface of the body to be worked. CONSTITUTION:An inert gas such as Ar and He, oxidizing or reducing gas or gaseous mixture is introduced into a closed vessel 1. High frequency voltage, DC voltage or pulse voltage is impressed between an electrode 4 and the parts 6 made of aluminum alloy to generate glow discharge and arc discharge and thereby the hydrated oxide having been formed on the surface of the parts 6 is removed with the cleaning due to the discharge. Thereafter, a valve 8 is closed and a vacuum pump 2 is actuated to draw out the cleaning gas after discharging from the vacuum vessel 1. Furthermore, a valve 10 is opened to introduce oxygen into the vacuum vessel 1 from an introduction pipe 11 and a compact and high-purity oxidized film is formed on the surface of the parts 6 made of aluminum alloy. |
