| 摘要 |
PURPOSE:To obtain a wafer accommodating jig which has no fear of contaminating a wafer by dust or the like, by notching each of the side plate ridges which define the side walls of each of the water accommodating grooves. CONSTITUTION:Accommodating grooves 2 are formed in the opposing surfaces of two side plates of a box-like frame structure so that the grooves 2 face each other. Side plate ridges are respectively formed between each pair of adjacent grooves 2 and at each side of the groove 2 forming portion. Each of the ridges which define the side walls of each wafer accommodating groove 2 is notched as illustrated to form a notched side plate ridge 4. |
