| 摘要 |
<p>PURPOSE:To prevent untreated processing, by providing a sensing apparatus for sensing the fluidized states and pressures of a cooling fluid and stock gas and an apparatus for controlling a plasma treatment apparatus to a non-operable state upon the reception of the signal from the sensing apparatus. CONSTITUTION:When a power source is closed after a predetermined plasma treatment time is preset to the timer of a control apparatus A, a rotary pump 9 is operated and a main valve 6 is opened. When a tank 2 is evacuated to be brought to a predetermined vacuum degree, a solenoid valve 26 for supplying stock gas is opened to supply the stock gas to a plasma generation pipe. When the vacuum degree in the tank 2 reaches the next predetermined value, plasma discharge in the plasma generation pipe is performed and the stock gas is converted to plasma. Thus generated plasma gas is injected in a rotating article to be painted from a jet pipe during the time set by the timer.</p> |
