CELLULE D'EVAPORATION D'UN COMPOSE LIQUIDE ADAPTEE A L'EPITAXIE PAR JETS MOLECULAIRES,申请号FR19840005050-传众专利搜索

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发明名称	CELLULE D'EVAPORATION D'UN COMPOSE LIQUIDE ADAPTEE A L'EPITAXIE PAR JETS MOLECULAIRES
摘要
申请公布号	FR2562099(B1)	申请公布日期	1986.06.20
申请号	FR19840005050	申请日期	1984.03.30
申请人	COMMISSARIAT A ENERGIE ATOMIQUE	发明人	JEAN PIERRE GAILLIARD, ALAIN MILLION ET JEAN PIAGUET;MILLION ALAIN;PIAGUET JEAN
分类号	C30B23/08;C23C14/24;C30B23/06;H01L21/203;(IPC1-7):C30B19/06	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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