CHARGED PARTICLE BEAM DEVICE, ALIGNMENT METHOD FOR CHARGED PARTICLE BEAM DEVICE, ALIGNMENT PROGRAM, AND RECORDING MEDIUM

摘要

The present invention shortens the time spent in a search for a visual field by a user in a charged particle beam device in which an observation range on a sample is set by using a captured image of the sample. When the outline (S) of a sample stage is circularly configured, for example, the central position of a sample stage image (62) on an optical image (61) is quickly, easily, and accurately obtained by calculating, from the coordinates of the respective vertices (67) of a triangle (68) circumscribed about the outline (S) created on the optical image (61) by the user, the incenter of the triangle (68) without direct recognition by automatic image analysis, which is complex and time-consuming, of the outline (S) of the sample stage image (62) on the optical image (61).