Sulfonium salt compound, method for producing the same, and photoacid generator

摘要

Provided is a sulfonium salt compound represented by the following general formula (I):;
where R1 and R2 each denote the same or a different alkyl group having 1 to 18 carbon atoms, R3 and R4 each denote the same or a different alkyl group having 1 to 10 carbon atoms, and X− denotes a sulfone imide anion or a perfluoroalkanesulfonic acid anion, wherein the substituents denoted by R3O and R4O are each located at an arbitrary position selected from the 2-position to the 8-position of the naphthyl group.

主权项

1. A sulfonium salt compound represented by the following general formula (I):wherein R1 and R2 each denote the same or a different alkyl group having 1 to 18 carbon atoms, R3 and R4 each denote the same or a different alkyl group having 1 to 10 carbon atoms, and X− denotes a sulfone imide anion or a perfluoroalkanesulfonic acid anion represented by the formula (IV):
R8—SO3−  (IV), wherein R8 denotes an alkyl group having 2 to 4 carbon atoms in which all hydrogen atoms are substituted by fluorine atoms, and wherein the substituents denoted by R3O and R4O are each located at an arbitrary position selected from the 2-position to the 8-position of the naphthyl group.