| 摘要 |
PURPOSE:To smooth the surface of an insulating layer by forming the insulating layer for insulating 2 magnetic body layers from a conductive coil with an amorphous material consisting essentially of SiO2. CONSTITUTION:The films of a lower magnetic pole 2 and a gap layer 3 are formed respectively in specified thickness on a substrate 1 whose surface is sufficiently polished and the substrate is formed into a specified shape by a photolithographic process. Then a soln. of ethyl orthosilicate in alcohol is coated on the member by using a spinner and heated to form an amorphous film consisting essentially of SiO2. The amorphous film is formed into a specified shape by etching, etc., using a liq. contg. hydrofluoric acid. A stable amorphous film of SiO2 is obtained on further heating and used as the lower insulating layer 4. A conductive coil 5 is formed on the lower insulating layer 4, the soln. of ethyl orthosilicate is again coated, the member is heat-treated to smooth the ruggedness due to the presence and absence of the conductive coil 5, an insulating layer 6 is formed thereon, an upper magnetic pole 7 is further formed thereon and the member is patterned by etching, etc., to obtain a thin film magnetic head.
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