REACTIVE VAPOR DEPOSITION OF OXIDE, NITRIDE AND OXIDE NITRIDE,申请号JP19860027765-传众专利搜索

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发明名称	REACTIVE VAPOR DEPOSITION OF OXIDE, NITRIDE AND OXIDE NITRIDE
摘要
申请公布号	JPS61201769(A)	申请公布日期	1986.09.06
申请号	JP19860027765	申请日期	1986.02.10
申请人	BALZERS AG	发明人	EEBERUHARUTO MOORU;HANSU KAARU PURUKAA;BUARUTAA HAAKU
分类号	C23C14/06;C23C14/32	主分类号	C23C14/06
代理机构		代理人
主权项
地址

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