| 摘要 |
PURPOSE:To decrease the effect due to the uneven local gas pressure, by flowing laser medium gas on the surface of an electrode at a high speed through a gap between the outer surface of an insulating tube and the discharging surface of the electrode, and concentrating the gas in the downstream direction at the discharge electrode. CONSTITUTION:A laser medium gas flows through a bonded pipe 7 and passes a space 13, which is formed between a cylindrical tube 11 that is provided approximately coaxially with a discharge tube 1 and a laser medium gas introducing block 12. In the vicinity of the end part of the insulating tube 11 on the side of the discharge tube 1, a cylindrical electrode 15 is arranged so that a specified gap 14 is provided from the outer surface of the insulating tube 11. An insulating material 16 is arranged on the surface on the downstream side of the gas stream. The inner surface of the cylindrical electrode 15 is limited by the surface of the electrode. In this constitution, the laser medium gas stream passes the axially symmetrical gap 14, which is formed by the surface of the cylindrical electrode 15 and the outer surface of the insulating tube 11 and aligned with the central axis of the discharge tube 1. Therefore, the uniform gas stream is obtained. All the laser gas flowing into the discharge tube 1 can be made to pass through the gap 14. Thus the gas flowing speed at the surface of the electrode 15 can be increased. |
