发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To suppress the deterioration in amount of accumulation of electric charge, which is to become data, by specifying a part of the configuration of a switching MISFET by an insulating film, which is constituted by oxidizing a semiconductor substrate or a well region. CONSTITUTION:A field insulating film 2 is provided on the main surface part of a semiconductor substrate 1 so that a part of the configuration of a switching MISFET, especially the width of a gate, is specified. The field insulating film 2 is constituted by an insulating film, which is formed by oxidizing the semiconductor substrate 1. The film 2 is formed so that mainly semiconductor elements are electrically isolated. Memory cells in a DRAM are constituted so that a pair of patterns is repeated in the direction, along which a bit line is extended. Data storing capacity elements of the memory cells neighboring the switching MISFET are constituted in the direction, along which a word line is extended, so that repeating patterns are provided one another. Therefore, the field insulating film 2 specifies the width of the gate of the switching MISFET and also specifies the configuration of the data storing capacitor element of the neighboring memory cell.
申请公布号 JPS61252657(A) 申请公布日期 1986.11.10
申请号 JP19850093601 申请日期 1985.05.02
申请人 HITACHI LTD 发明人 SHIMIZU SHINJI;TSUCHIYA OSAMU
分类号 H01L27/10;H01L21/8238;H01L21/8242;H01L27/092;H01L27/108 主分类号 H01L27/10
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