发明名称 Semiconductor device including catalyst layer and graphene layer thereon and method for manufacturing the same
摘要 According to one embodiment, a semiconductor device is disclosed. The device includes a foundation layer including first and second layers being different from each other in material, and the foundation layer including a surface on which a boundary of the first and second layers is presented, a catalyst layer on the surface of the foundation layer, and the catalyst layer including a protruding area. The device further includes a graphene layer being in contact with the protruding area.
申请公布号 US9484206(B2) 申请公布日期 2016.11.01
申请号 US201514637041 申请日期 2015.03.03
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 Ishikura Taishi;Kajita Akihiro;Sakai Tadashi;Isobayashi Atsunobu;Wada Makoto;Saito Tatsuro;Kitamura Masayuki;Sakata Atsuko
分类号 H01L23/48;H01L21/283;H01L23/544;H01L21/02;H01L29/16 主分类号 H01L23/48
代理机构 Holtz, Holtz & Volek PC 代理人 Holtz, Holtz & Volek PC
主权项 1. A semiconductor device comprising: a foundation layer including first and second layers being different from each other in material, the foundation layer including a surface on which a boundary of the first and second layers is presented; a catalyst layer on the surface of the foundation layer, the catalyst layer including a protruding area, and an edge portion of the protruding area or a part of the protruding area except the edge portion being disposed directly above the boundary of the first and second layers; and a graphene layer in contact with the protruding area.
地址 Tokyo JP