发明名称 |
Semiconductor device including catalyst layer and graphene layer thereon and method for manufacturing the same |
摘要 |
According to one embodiment, a semiconductor device is disclosed. The device includes a foundation layer including first and second layers being different from each other in material, and the foundation layer including a surface on which a boundary of the first and second layers is presented, a catalyst layer on the surface of the foundation layer, and the catalyst layer including a protruding area. The device further includes a graphene layer being in contact with the protruding area. |
申请公布号 |
US9484206(B2) |
申请公布日期 |
2016.11.01 |
申请号 |
US201514637041 |
申请日期 |
2015.03.03 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
Ishikura Taishi;Kajita Akihiro;Sakai Tadashi;Isobayashi Atsunobu;Wada Makoto;Saito Tatsuro;Kitamura Masayuki;Sakata Atsuko |
分类号 |
H01L23/48;H01L21/283;H01L23/544;H01L21/02;H01L29/16 |
主分类号 |
H01L23/48 |
代理机构 |
Holtz, Holtz & Volek PC |
代理人 |
Holtz, Holtz & Volek PC |
主权项 |
1. A semiconductor device comprising:
a foundation layer including first and second layers being different from each other in material, the foundation layer including a surface on which a boundary of the first and second layers is presented; a catalyst layer on the surface of the foundation layer, the catalyst layer including a protruding area, and an edge portion of the protruding area or a part of the protruding area except the edge portion being disposed directly above the boundary of the first and second layers; and a graphene layer in contact with the protruding area. |
地址 |
Tokyo JP |