Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus

摘要

There is provided a charged particle beam apparatus that includes a trajectory monitoring unit which is disposed above an objective lens (14) and which includes an optical element (12) having a lens action and a trajectory correcting deflector (10). An applied voltage and an excitation current of the optical element (12) are set to zero after a trajectory correction of a primary charged particle beam (30). Accordingly, the lens action and an aberration of the optical element (12) have no influence on resolution.

主权项

1. A charged particle beam apparatus comprising:
a charged particle source for supplying a primary charged particle beam; a condenser lens for controlling a focusing angle and a focusing position of the primary charged particle beam; an objective lens for focusing the primary charged particle beam on a sample; a scanning device that scans the sample with the primary charged particle beam; a detector that detects charged particles which are generated from the sample; an image processing device that forms a sample image based on a signal from the detector; and a trajectory monitoring unit that is disposed above the objective lens and includes an optical element having a lens action and a trajectory correcting deflector, wherein an applied voltage and an excitation current of the optical element are set to zero after a trajectory correction of the primary charged particle beam.