发明名称 CONTRAST ENHANCEMENT LAYER
摘要 Composition and method for enhancing the contrast of images of an underlying photolithographic layer. A photographic element, including a photoresist layer,is applied to a substrate. The photoresist layer contains a contrast-enhancing layer including at least one light-sensitive compound capable of producing acidic photoproducts upon exposure to actinic radiation, at least one indicator dye that changes color on exposure to acidic conditions and at least one polymeric binder soluble in water or weakly alkaline aqueous solutions. The photographic element is exposed to active radiation sufficient to cause photobleaching of the contrast enhancement layer and exposure of the photoresist layer. The photographic element is developed in an aqueous photoresist developer, whereby the contrast enhancement layer is stripped from the photoresist layer by the developer.
申请公布号 WO8607473(A1) 申请公布日期 1986.12.18
申请号 WO1986US01200 申请日期 1986.05.29
申请人 FAIRMOUNT CHEMICAL CO., INC. 发明人 BLUMEL, DAVID, B.;DEUTSCH, ALBERT, S.
分类号 H01L21/00;G03C1/52;G03F7/00;G03F7/09;G03F7/095;(IPC1-7):G03C1/54;G03C1/60;G03C1/74;G03F7/08;G03F7/26 主分类号 H01L21/00
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