| 摘要 |
PURPOSE:To obtain a microlens having large NA and short focal length by forming recessed dents of an underlying layer and intermediate layer and forming a convex lens layer consisting of a material having the refractive index larger than the refractive indexes of the underlying layer and intermediate layer thereon. CONSTITUTION:The underlying layer 11 is formed to an optional thickness at which rugged shaped remain. The intermediate layer 12 to control the bottom surface shape of the lens layers 1d-4d is provided between the layer 11 and the lens layers 1d-4d. The microlens which is a convex lens is obtd. in the above-mentioned manner. The bottom surface shape of the lens is determined by the shapes of the underlying layer and the intermediate layer 12. The layer 11 is thus formed to such a shape at which the ruggedness remains to some extent on the surface of a solid-state image sensing device and the shape of the bottom surface of the lens can be controlled by adding the intermediate layer 12 thereto. The underlying layer is formed of the org. or inorg. material which is optically transparent and has the refractive index smaller than the refractive index of the material for the lens layers.
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