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发明名称
APPARATUS EQUIPPED WITH VACUUM SMALL CHAMBER AND PROCESSING ARTICLE
摘要
申请公布号
JPS624876(A)
申请公布日期
1987.01.10
申请号
JP19860151843
申请日期
1986.06.30
申请人
发明人
分类号
C23C14/24;C23C8/36;C23C16/50;C23C16/503;H01J37/32
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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