| 摘要 |
PURPOSE:To enable the entire surface of an article to be treated to be uniformly irradiated with plasma, by sucking plasma gas ejected from a plasma ejecting pipe, through either one of a main exhaust vent and sub-exhaust vents and then sucking it through the other. CONSTITUTION:In a chamber 1 provided with a plasma ejecting pipe 10, a main exhaust vent 2 and sub-exhaust vents 3, a synthetic resin article B to be treated is placed among the pipe 10, the main exhaust vent 2 and the sub- exhaust vents 3. The chamber 1 is evacuated and plasma gas ejected from the plasma ejecting pipe 10 is sucked through either one of the main exhaust vent 2 and the sub-exhaust vents 3 and then through the other. In this way, the entire surface of the article B can be uniformly irradiated with plasma. |
