| 摘要 |
PURPOSE:To increase a trimming accuracy and to automate the measurement by reducing the effect of a noise, etc. as far as possible by deciding the deciding signal obtd. by comparing with the prescribed reference plural times on each pulse simultaneously with the control pulse of a laser beam. CONSTITUTION:A laser beam is scanned by setting a probe on a resistance body. A pulse signal V4 is outputted from a laser beam control pulse generating circuit 6 on reaching to a trimming start point. In this case the laser beam becomes ON by transmitting a pulse signal V13 from a terminal 17 in case of the initial value of the resistance body being smaller than the trimming set value. The laser beam becomes OFF by generating a negative pulse signal V11 in case of the measured resistance value becoming bigger than the trimming set value. Thereafter the decision of the quality of the trimming is performed and the migration is performed to the following trimming. The increase in the trimming accuracy is thus made possible. |
