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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6288369(A)
申请公布日期
1987.04.22
申请号
JP19850230658
申请日期
1985.10.15
申请人
FUJITSU LTD
发明人
GOTO HIROSHI
分类号
H01L21/8234;H01L21/82;H01L21/8247;H01L27/08;H01L27/088;H01L27/118;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/8234
代理机构
代理人
主权项
地址
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