| 摘要 |
PURPOSE:To adjust the surface accuracy of a body to be positioned which is mounted on a fine deforming element with high accuracy by extending or contracting a piezoelectric effect element and displacing finely the curved positioning surface of the deforming element main body. CONSTITUTION:The fine deforming element 1 consists of the deforming element body 2 which deforms elastically, the piezoelectric element 3 arranged in the main body 2, etc. The main body 2 is formed in a sectionally semicylindrical shape which is large in diameter at the center part. Then, a voltage is applied to the element 3 of the element 1 from a voltage controller 9. The element 3 deforms by expanding or contracting according to the applied voltage and the main body 2 also deforms finely to vary in height accordingly. Consequently, the surface accuracy of the body to be positioned which is mounted on the element 1 is adjusted with high accuracy.
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