PRODUCTION OF SEMICONDUCTOR DEVICES

摘要

PRODUCTION OF SEMICONDUCTOR DEVICES A process is disclosed in which a layer of an organic material having a window is deposited onto the surface of an initial semiconductor structure. Layers are deposited on the exposed surface of the semiconductor, of which one layer is an ion-beam resisting material. Corresponding layers are deposited on the organic material. The organic material is then lifted off together with the layers deposited thereon. Ion-beam milling of the semiconductor material to either side of the layer of ion beam resisting material followed by removal of any remnant thereof results in a structure having an elevated semiconductor portion carrying an electrode. The invention can be applied to the production of rib waveguide electrooptic devices, including phase modulators.