| 摘要 |
PURPOSE:To obtain a membrane type thermal head having high heat resistance, long life and high inherent resistivity and adjustable in temp. coefficient, by providing a heat generating resistor membrane based on a high m.p. metal, silicon and aluminum to a substrate having a heat insulating layer and forming an abrasion resistant protective film to the surface thereof and, further, connecting a power supply electrode to said resistor membrane. CONSTITUTION:A glaze layer 2 is formed to a glazed ceramic substrate 1. The glaze layer 2 is an oxide corresponding to the glaze of porcelain and contains silicon oxide and aluminum oxide. A membrane heat generating resistor 3 is formed on the glaze layer 2 in a film form and a power supply electrode 4 is further formed thereon and, at last, an abrasion resistant protective film (e.g., a Si-O system, a Si-Al-N system, a TA2O5-SiO2 system) 6 is formed in a film form. The heat generating resistor 3 is nitride containing silicon, aluminum and a high m.p. metal (at least one of Ti, Mo, W, Hf, Ni, V, Zr, La, Cr, Ta, Fe and Co). This high m.p. metal is used alone or in combination and largely varies in the resistivity range of 10<7>-10<2>muOMEGAcm of the heat generating resistor even in both cases. |
