ELECTRODE FOR VAPOR PHASE REACTOR

摘要

PURPOSE:To efficiently control the generation of abnormal electric discharge by forming the upper electrode in a parallel plate electrode with a metallic sheet having through-holes and a perforated insulating thin sheet closely attached to the discharge surface side of the metallic sheet, and making the diameter of the hole of the insulating sheet smaller than the diameter of the through-hole of the metallic sheet. CONSTITUTION:The parallel plate electrode for a vapor phase reactor is formed with the upper electrode 100 and a grounded base electrode 200. The upper electrode 100 is formed with the metallic sheet 110 provided with many through- holes 120 for blowing off a film forming gaseous reactant and the perforated insulating thin sheet 140 closely attached to the discharge surface side of the metallic sheet 110. The diameter of the opening part 130 provided to the perforated insulating thin sheet 140 is made smaller than the diameter of the through- hole 120 of the metallic sheet 110 for an electrode. Besides, the metallic sheet 110 is made of aluminum, and the insulating thin sheet 140 is made of a ceramic.