| 摘要 |
PURPOSE:To make it possible to observe wave-forms of many signal lines while preventing increase of chip area, by providing a plurality of pads for signal measurement and lead lines drawn out from the pads, connection parts of which are arranged on a base grid. CONSTITUTION:In a base cell, square pads for wave-form observation 11, are arranged in a vertical row. From these pads, each lead line 12 is dawn out in the vertical direction. Connection parts 13 are arranged at the positions corresponding to a base grid on the upper and the lower ends of a monitor pad cell 20. The lead line 12 is bent with a specified clearance so as to avoid the other pad for wave-form observation 11,. These pads for wave-form observation 11, and lead lines 12 are formed by patterning of aluminum. Therefore, it is unnecessitated to use many monitor pads even in the case of many signal lines to observe wave-forms, so that the total area of an integrated circuit can be reduced and the high integration is achieved.
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