| 摘要 |
PURPOSE:To contrive the reuse of a laser gas by regenerating the laser gas filled in the second subtank after the laser gas used in an oscillating container is filled in the first subtank and moisture is removed. CONSTITUTION:When a laser oscillation finishes in a day, the laser gas in an oscillating container 3 is filled in the first subtank 25 under pressure and dehydrated by a previously filled hygroscopic agent. On the second day, the first day's laser gas in the first subtank 25 is transferred in the second subtank 43 and is regenerated in the second subtank 43 by an oxidation catalyst such as platinum also using the heat of a laser oscillator. On the third day, the laser gas in the second subtank 43 is leaked for a set time into the oscillating container 3 by a timer. In this way, the once used laser gas in the oscillating container is regenerated and reused without abolishing everyday. |
