| 摘要 |
PURPOSE:To obtain the titled body having improved dark resistivity and carrier mobility of a carrier transfer layer composed of a-SiC:H by using a-SiC film to every layer comprising a carrier injection preventive layer, the carrier trans fer layer and a carrier generating layer, and by setting up a specific condition to said layers. CONSTITUTION:The titled body is a laminate composed of the carrier injection preventive layer 2a, the carrier transfer layer 5 and the carrier generating layer 3a mounted on a substrate 1. The carrier injection preventive layer 2a is composed of a-SiC, and has a ratio of atomic compositions of C and Si of a range of (1:9)-(9:1). The carrier generating layer 3a is composed of a-SiC, and the carrier transfer layer 5 is composed of a-SiC:H and has the ratio of the atomic compositions of C and Si of the range of (1:9)-(9:1) and has <=1,000 absorption coefficient of 2,860cm<-1>, and >=1,000 absorption coefficient of 2,090cm<-1> at the infra-red absorption spectrum. Thus, the dark resistivity and the carrier mobility of the carrier transfer layer which is composed of a-SiC:H and is formed as a layer of function separation type photosensitive body, may be improved. |
