| 摘要 |
PURPOSE:To provide a high visible light transmissivity and to assure the quantity of incident light to a photosensitive body consisting of Se-As or Se/Te by forming a surface protective layer of an amorphous hydrocarbon film which is formed by a glow discharge method and contains oxygen atoms. CONSTITUTION:The photosensitive body consisting of the Se-As or Se/Te is provided with the surface protective film 3 consisting of the amorphous hydrocarbon film which is formed by the glow discharge in a low vacuum on the surface of said body and contains the oxygen atoms. Gaseous hydrocarbon and gaseous oxygen compd. are used as the carrier gas of the gases for forming the a-C:O film by the glow discharge method and generally and commonly used gaseous hydrogen or gaseous argon, etc., are used for the carrier gas thereof. The phase state of the gaseous hydrocarbon is not always required to be in the gaseous phase at and under an ordinary temp. and atmospheric pressure and said gas is usable in either liquid or solid phase if the gas can be evaporated through melting, evaporation, sublimation, etc., by heating or pressure reduction, etc. For example, satd. hydrocarbon, unsatd. hydrocarbon, alicyclic hydrocarbon, arom. hydrocarbon, etc., are used for the hydrocarbon. |
