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发明名称
METHOD AND JIG FOR GROWING THIN FILM CRYSTAL
摘要
申请公布号
JPS6330395(A)
申请公布日期
1988.02.09
申请号
JP19860174500
申请日期
1986.07.23
申请人
NEC CORP
发明人
FUJINO YOSHIO
分类号
C30B19/00;C30B29/48;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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