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发明名称
摘要
申请公布号
JPS6333623(U)
申请公布日期
1988.03.04
申请号
JP19860127461U
申请日期
1986.08.20
申请人
发明人
分类号
H01L21/208;H01L33/00
主分类号
H01L21/208
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代理人
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