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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6358851(A)
申请公布日期
1988.03.14
申请号
JP19860201671
申请日期
1986.08.29
申请人
OKI ELECTRIC IND CO LTD
发明人
SUZUKI KENICHI
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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