| 摘要 |
PURPOSE:To stabilize light irradiation at normal temperature from a solid state light emitting element by so forming aluminum linear electrodes and Mo linear electrodes to cross each other through TiO2B insulating film on a triangular diffraction grating formed on the flat surface of a semicylindrical substrate made of a transparent material, and then forming an SiO2 protective film. CONSTITUTION:An aluminum linear electrode 2 of 120-300Angstrom thick, a TiO2 insulating film 3 of 20-80Angstrom , an Mo linear electrode 4 of 100-400Angstrom thick, and an SiO2 protective film 5 of 1000Angstrom or more are sequentially formed by vacuum depositing on the diffraction grating of a semicylindrical substrate 1 made of glass formed with the diffraction grating of 20-60 deg. of brazing angle in depth of 200Angstrom or deeper at a pitch of 0.3-1mum on a plane. Thus, a light having narrow spectral width at specific light irradiating angle, strong irradiating intensity, stably at ambient temperature can be irradiated. |
