| 摘要 |
<p>PURPOSE:To form a linear motor-driving air stage in small size and light weight to be easily assembled by forming guide faces of a stage moving direction on both sides of a stator holding frame, and disposing a movable element in the groove of the central part of the frame. CONSTITUTION:Upward and downward guide faces 10a, 10b for moving a movable pedestal 11 are formed on the upper surface of a stage base 10, and a linear motor 15 is disposed at the intermediate. Attachment members 13A, 13B for attaching air pads 12a, 12b are fixed to both side ends of the lower surface of the pedestal 11, and compressed air is fed from feed pipes 14A, 14B. The motor 15 is composed of a movable element 16 having an electromagnetic coil, a stator 17, and a stator holding frame 18. A long groove 18a is provided on the frame 18 to move the element 16, both guide sides 18b, 18c are formed in parallel, and attachment members 13A, 13B having air pads 12c, 12d approach. Thus, thin air film layers are formed between the guides 10a, 10b, 18b, 18c to be smoothly moved.</p> |
