摘要 |
PURPOSE:To make discharge stable even in the case of a pulse operation; besides, a pulse light emitted as a matter of fact can be immediately risen so as not to be late with laser oscillations by providing a light source which generates ultraviolet rays at an outside of a discharge tube. CONSTITUTION:A laser medium gas being filled in a discharge part 7 circulates in the direction of the arrows 8 and 9 by a ventilator 13. A power is supplied to a position between electrodes 2 and 3. A glow discharge is ignited and a light energy corresponding to a power energy fed by actions of a total reflection mirror 10 and an output mirror 11 is made up and, in other words, laser oscillations take place. Oscillation lights are filtered out as output laser lights 12 out of a output mirror 11. A laser flow 9 where its temperature is elevated due to the glow discharge 6 is cooled by a heat exchanger 16. Ultraviolet rays emitted out of an ultraviolet ray source 18 that is installed just in the vicinity of an outer part of discharge tube 1 are irradiated to a part to be ignited of flow discharge in the discharge tube 1. Energy of lights having a short wave length such as the ultraviolet rays is so high that irradiation of the laser medium gas has an action somewhat to ionize this gas and then, the entire laser medium gas in the discharge gas tube 1 is ionized uniformly to some extent. |