发明名称 PRODUCTION OF STAMPER
摘要 PURPOSE:To form a stamper which has no flaws, etc., by forming a metal layer having a specific thickness on an original glass plate subjected to mirror polishing and coating a photoresist thereon, then forming rugged patterns as signals thereon by projection of laser light thereto and subjecting the metal layer to electroforming of Ni after a conducting treatment. CONSTITUTION:The metal layer 2 consisting of Cr, etc., is formed to 100-1,000Angstrom thickness by a sputtering method on the original glass plate 1 subjected to mirror polishing and after the photoresist 3 is coated thereon, the rugged patterns as the signals are formed by the projection of the laser light 4. The metal layer is then subjected to the conducting treatment and to the electroforming of Ni. As a result, the stamper which has no stains and flaws on the surface is produced and the quality of a substrate for optical information recording media is improved.
申请公布号 JPS63147577(A) 申请公布日期 1988.06.20
申请号 JP19860295202 申请日期 1986.12.11
申请人 SEIKO EPSON CORP 发明人 YAMADA KUNIHARU
分类号 B05D3/10;G11B7/26 主分类号 B05D3/10
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