发明名称 WORKPIECE HOLDING APPARATUS
摘要 A workpiece holding apparatus, including: a rigid body having a vent; a suction pad adhered onto the lower end face of rigid body and having an opening communicating with vent, being configured to suck and hold a workpiece; an air controlling mechanism communicating with the vent, being configured to aspirate or discharge air through vent to aspirate or discharge air from opening; and a swelling portion being configured to be supplied with air by air controlling mechanism through the vent to swell out at least part of an area of suction pad to be in contact with the workpiece toward the workpiece in detaching workpiece from suction pad; wherein suction pad is configured to suck and hold workpiece by bringing the opening into contact with workpiece while aspirating air by air controlling mechanism through opening, and is configured to detach the workpiece from suction pad by discharging air from opening.
申请公布号 SG11201607263V(A) 申请公布日期 2016.10.28
申请号 SG11201607263V 申请日期 2015.02.17
申请人 SHIN-ETSU HANDOTAI CO.,LTD. 发明人 YASUDA, TAICHI;ENOMOTO, TATSUO
分类号 H01L21/677;B24B41/06;B25J15/06;H01L21/304 主分类号 H01L21/677
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